Investigation of the dynamic properties of on-chip coupled piezo/photodiodes by time-resolved atomic force and Kelvin probe microscopy

摘要: We have studied the dynamic properties of hybrid devices in which piezoelectric material lead zirconate titanate is integrated with silicon photodiodes on-chip. Such an system enables direct conversion light energy into mechanical deformation and motion, opening up new pathways for propulsion microrobots nanorobots. By operating our under alternating illumination simultaneously recording time-dependent surface potential, we were able to derive frequency voltage dependent time constants phase relations between photovoltage deformation. observed that top contact resistance limits response 6 ms small area capacitance low. Furthermore, a transition at low seems be consistent occurrence negative capacitance. Our method using atomic force Kelvin probe microscopy proves suitable investigation nanoscale, light-driven piezo systems can design next generation devices.