Method of transferring a thin layer onto a target substrate having a coefficient of thermal expansion different from that of the thin layer
作者: Franck Fournel
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摘要: A method of transferring a thin layer from a source substrate having a surface layer of a first material along a free surface thereof to a target substrate having at least one surface layer of …
F Udrea, W I Milne, H T Lim, A Popescu, J Bonar, D M Garner, A Blackburn, P L F Hemment, G J Ensell, The fabrication of a partial SOI substrateElectrochemical Society. ,(1999)