Apparatus for treating wafers in the manufacture of semiconductor elements

摘要: An apparatus for the treatment of wafers in manufacture semiconductor elements form a process buffer through which plurality travel at same time to various stations and cooperates with transport wafers. The has shaft magazine, stations, each one wafer, are disposed spaced apart from above another. magazine is provided loading unloading opening, movable individually into vicinity opening. occupies less surface area line elements, enables independent external factors, can be used types elements.