A detailed study on phonon transport in thin silicon membranes with phononic crystal nanostructures

摘要: Abstract A common method to improve thermoelectric performance is reduce thermal conductivity by enhancing phonon scattering. In this paper, a frequency-dependent radiative transport equation (PRTE) solver, based on the discrete ordinates method, developed simulate in thin silicon membranes with phononic crystal nanostructures. The influence of geometric parameters discussed detail. Besides, nonlinear regression model attained for predicting nanostructures using non-linear least-squares method. results indicate that reduced mainly due back scattering phonons pore boundaries, and larger mean free path have stronger When placement fixed, configuration affects addition, primarily controlled three parameters, including r ⊥ , || u . Moreover, obtained reveals relationship between well, which can offer useful suggestions fabricating low conductivity.