Mechanical and tribological properties of a-C/a-C:Ti multilayer films with various bilayer periods
作者： W.Q. Bai , J.B. Cai , X.L. Wang , D.H. Wang , C.D. Gu
DOI: 10.1016/J.TSF.2014.03.039
关键词:
摘要: Abstract Thick a-C/a-C:Ti multilayer films with bilayer periods of 12–70 nm were deposited on Ti6Al4V alloy substrate by means closed field unbalance magnetron sputtering. The morphology and microstructure the investigated scanning electron microscopy, high resolution transmission microscopy X-ray photoelectron spectroscopy. Nanocrystalline TiC was distributed in a-C:Ti layer at interface between two adjacent layers. mechanical tribological properties evaluated Rockwell scratch tests, a nanoindentor ball-on-disk tribometer. film period 12 nm showed highest adhesion strength, hardness (26 GPa) elastic modulus (232 GPa); it also had lowest average coefficient friction (0.09) wear rate 8.06 × 10− 17 m3 N− 1 m− 1.
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