Silicon fusion bonding for fabrication of sensors, actuators and microstructures
作者： Philip W. Barth
DOI: 10.1016/0924-4247(90)87060-V
关键词:
摘要: … The ultimate lower limits of pressure sensor size are discussed and are shown to be limited by … Note that the actual tabs are thin enough to be flexible and so do not shatter at contact. …
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sci-hub.se 参考文章(14)
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