Mercury process gold ballbond removal apparatus

作者: Allen W. Brouillette , Todd McMullin , Richard W. Wasielewski , Glenn L. Bomberger , Paul D. Bell

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摘要: A method and apparatus for reducing the risk of environmental contamination from mercury spillage during carry over between processing tanks gold ball bond removal process by providing a self-contained, compact, environmentally safe system use with toxic chemicals liquids. The present invention provides integrally molded enclosure upper lower chambers separated partition. partition has plurality stations formed therein, each which is capable containing chemical liquid. comprises dipping slide semiconductor chip first into liquid, then decontamination station finally second station.