Surface micromachined pressure sensors with integrated CMOS read-out electronics
作者： H. Dudaicevs , M. Kandler , Y. Manoli , W. Mokwa , E. Spiegel
DOI: 10.1016/0924-4247(94)80002-2
关键词:
摘要: … sensor system with on chip electronics is presented. The capacitive pressure sensor is fabricated using a CMOS … The temperature sensor shows a straight linear output signal in a …
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