Vacuum driven proximity sensor

摘要: A vacuum-driven gas gauge proximity sensor for sensing a difference between reference surface standoff and measurement is disclosed. Unlike existing sensors, the uses vacuum to reverse traditional flow of through sensor, such that flows inward across standoffs nozzles. The conditioned ambient vacuumed into nozzles channels are coupled at junction single channel. channel used evacuate sensor. bridge couples channels. mass along monitors rates detect can be initiate control action. pump-driven liquid also