Energy loss of electrons backscattered from solids: measured and calculated spectra for Al and Si†
作者： Maurizio Dapor , Lucia Calliari , Sergey Fanchenko
DOI: 10.1002/SIA.4835
关键词:
摘要: Electron energy loss distributions relative to Al and Si are calculated for primary electron energies ranging from 500 eV 2000 eV under the assumption that experimental spectra arise electrons undergoing a single large-angle elastic scattering event (so-called V-type trajectories). The method used calculate is based on combination of Chen Kwei dielectric formalism with trajectory modeling. Good agreement found between measured spectra. Copyright © 2012 John Wiley & Sons, Ltd.
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