The finite size effect in a planar inductively coupled plasma
作者： Chin Wook Chung , S. S. Kim , S. H. Seo , H. Y. Chang , N. S. Yoon
DOI: 10.1063/1.373794
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摘要: Plasma parameters from the measured electron energy distribution are obtained with changing chamber height at low pressure 2 mTorr. It is observed that density has a local peak certain while temperature decreases monotonously increasing height. The maximum shifted according to bounce resonance condition when driving frequency changed. kinetic model well agrees experiment. This shows against plasma size due been theoretically discussed.
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