A Novel Control Approach for High-Precision Positioning of a Piezoelectric Tube Scanner

摘要: An optimal controller for high-precision spiral positioning of a piezoelectric tube scanner used in an atomic force microscope (AFM) is proposed this paper. In the control scheme, second-order vibration compensator incorporated with (PTS) to suppress PTS at resonant frequency. internal model reference sinusoidal signal included augmented plant and integrator introduced linear quadratic Gaussian which reduces phase error between input output sinusoids. The method allows commercial AFM scan high scanning speeds as alternative raster approach. performance assessed closed-loop frequency response, tracking accuracy, set scanned images. images obtained using standard PI also presented comparison Experimental results prove effectiveness method.