作者: Gun Hee Kim , Hyun Soo Kim , Hyun Soo Shin , Byun Du Ahn , Kyung Ho Kim
DOI: 10.1016/J.TSF.2009.01.151
关键词:
摘要: … 3 shows (a) In 3d, (b) Ga 2p, (c) Zn 2p, and (d) O 1s of the XPS spectra of IGZO films … the low binding energy (O I ) side of the O 1s spectrum at 530.35 eV can be attributed to O 2− ions …