Biocompatible electrodes and methods of manufacturing biocompatible electrodes
作者： Roel Daamen , Matthias Merz
DOI:
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摘要: A biocompatible electrode is manufactured by depositing filling metal 36 and etching back the to surface of surrounding insulator 30 . Then, a further etch forms recess 38 at top via 32 An 40 then deposited etched fill form 42 In this way, planar achieved. The step may be carried out in same CMP tool as used hydrogen peroxide used.
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