Novel magnetic–acoustic resonator sensors for remote liquid phase measurement and mass detection

作者: F. Lucklum , B. Jakoby

DOI: 10.1016/J.SNA.2007.10.031

关键词:

摘要: … In the case of thickness shear modes and thin film loading, the frequency shift is described by the Sauerbrey formula previously derived for quartz crystals, which is similarly applicable …

参考文章(16)
Josef Krautkrämer, Herbert Krautkrämer, Werkstoffprüfung mit Ultraschall Springer Berlin Heidelberg. ,(1961) , 10.1007/978-3-642-52961-0
C. Vancura, Y. Li, K.-U. Kirstein, F. Josse, A. Hierlemann, J. Lichtenberg, Fully integrated CMOS resonant cantilever sensor for biochemical detection in liquid environments international conference on solid state sensors actuators and microsystems. ,vol. 1, pp. 640- 643 ,(2005) , 10.1109/SENSOR.2005.1496498
Stephen J. Martin, Victoria Edwards. Granstaff, Gregory C. Frye, Characterization of a quartz crystal microbalance with simultaneous mass and liquid loading Analytical Chemistry. ,vol. 63, pp. 2272- 2281 ,(1991) , 10.1021/AC00020A015
Adrian C. Stevenson, Christopher R. Lowe, Noncontact excitation of high Q acoustic resonances in glass plates Applied Physics Letters. ,vol. 73, pp. 447- 449 ,(1998) , 10.1063/1.121895
Peter Hauptmann, Nico F de Rooij, Frieder Lucklum, Magnetic direct generation of acoustic resonances in silicon membranes Measurement Science and Technology. ,vol. 17, pp. 719- 726 ,(2006) , 10.1088/0957-0233/17/4/017
X. Jian, S. Dixon, K.T.V. Grattan, R.S. Edwards, A model for pulsed Rayleigh wave and optimal EMAT design Sensors and Actuators A-physical. ,vol. 128, pp. 296- 304 ,(2006) , 10.1016/J.SNA.2006.01.048
Carsten Behling, Ralf Lucklum, Peter Hauptmann, Response of quartz-crystal resonators to gas and liquid analyte exposure Sensors and Actuators A-physical. ,vol. 68, pp. 388- 398 ,(1998) , 10.1016/S0924-4247(98)00088-0
Adrian C. Stevenson, Christopher R. Lowe, Magnetic–acoustic–resonator sensors (MARS): a new sensing methodology Sensors and Actuators A-physical. ,vol. 72, pp. 32- 37 ,(1999) , 10.1016/S0924-4247(98)00208-8
S.V. Krishnaswamy, J. Rosenbaum, S. Horwitz, C. Vale, R.A. Moore, Film bulk acoustic wave resonator technology IEEE Symposium on Ultrasonics. pp. 529- 536 ,(1990) , 10.1109/ULTSYM.1990.171421
Xuecheng Jin, I. Ladabaum, B.T. Khuri-Yakub, The microfabrication of capacitive ultrasonic transducers IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 7, pp. 295- 302 ,(1998) , 10.1109/84.709646