Comparison of optical and capacitive measurements of slider dynamics

摘要: A simultaneous slider air bearing thickness measurement is made using capacitive and optical techniques. The first technique measures the capacitance between a conducting disk probe attached to slider, other path length interferometry. quartz with transparent conductive coating used for this experiment. Measurements are simultaneously at three corners of from DC 100 kHz. flying height measurements agree within 7 nm while AC fluctuations noise level each (0.2 nm).