Plasma diagnostics in pulsed laser TiN layer deposition
作者： J. Hermann , A. L. Thomann , C. Boulmer‐Leborgne , B. Dubreuil , M. L. De Giorgi
DOI: 10.1063/1.358708
关键词:
摘要: … species are formed in the early high-temperature plasma phase… nitrogen species by optical emission spectroscopy was very difficult because the expected nitrogen density in the plasma …
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