作者: O. G. Ashkhotov , I. B. Ashkhotova , A. P. Bliev , T. T. Magkoev , D. A. Krymshokalova
DOI: 10.1134/S0036024414100033
关键词:
摘要: The interaction between argon ions and a natural oxide layer of polycrystalline aluminum is studied via Auger electron (AE) energy loss (EEL) spectroscopy. It found that bombardment with whose lower than the Al2O3 sputtering threshold results in accumulation bombarding interstitial surface voids, thus forming supersaturated solid solution target atoms nitrogen entrapped by ion beam from residual gas working chamber spectrometer.