Changes in a surface of polycrystalline aluminum upon bombardment with argon ions

作者: O. G. Ashkhotov , I. B. Ashkhotova , A. P. Bliev , T. T. Magkoev , D. A. Krymshokalova

DOI: 10.1134/S0036024414100033

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摘要: The interaction between argon ions and a natural oxide layer of polycrystalline aluminum is studied via Auger electron (AE) energy loss (EEL) spectroscopy. It found that bombardment with whose lower than the Al2O3 sputtering threshold results in accumulation bombarding interstitial surface voids, thus forming supersaturated solid solution target atoms nitrogen entrapped by ion beam from residual gas working chamber spectrometer.

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