Capacitive pressure transducer

摘要: A highly linear capacitive pressure transducer system includes one or more conductive plates mounted on a diaphragm for deflection toward and away from another conducting plate. The opposed include both main variable capacitor small separate compensation the same structure. is connected in parallel with larger fixed reference capacitor. outputs capacitor, capacitance including are compared electronic circuitry which produces an output signal proportional to variations applied diaphragm. When has change generally of order magnitude as deviations linearity changes significantly increased.