Improved performance of nonevaporable getter activated by a continuous wave infrared laser
作者： S. N. Cha , J. Y. Choung , B. G. Song , J. M. Choi , I. T. Han
DOI: 10.1116/1.1371016
关键词:
摘要: We demonstrate a simple and efficient activation method of nonevaporable getter where local heating is provided by laser source. Dependence various parameters such as power, scan speed, irradiation time the degree was experimentally examined in detail. It shown that enhances process considerably shortening increasing gas absorption capacity required to achieve desired vacuum level for flat panel display application. The compared conventional thermal method. Under optimized conditions, we achieved 2×10−6 Torr from initial value 4×10−4 Torr. Therefore, very promising technology which overcomes number problems resulting
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