Pitch changing device for changing pitches of plate-like objects and method of changing pitches

摘要: A pitch changing device of the present invention includes a lift mechanism for unloading plurality wafers arranged in cassette at predetermined pitches from while are kept unchanged, and chuck holding unloaded unchanged. The moving pieces mounted to be movable an arrangement direction wafers, respectively supporting elastic members expandible/contractible driving expanding/contracting members. When expand/contract by mechanism, changed held. handler variably wafer stands changes lifted.