p‐Type ZnO Layer Formation by Excimer Laser Doping
作者： T Aoki , Y Shimizu , A Miyake , A Nakamura , Y Nakanishi
DOI: 10.1002/1521-3951(200201)229:2<911::AID-PSSB911>3.0.CO;2-R
关键词:
摘要: … use of excimer laser doping to create heavily doped layer with high … laser doping technique is one of the diffusion doping techniques used as a post growth process. The excimer laser …
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