SEM, AFM and TEM studies for repeated irradiation effect of femtosecond laser on 4H-SiC surface morphology at near threshold fluence
作者： Chengwu Wang , Syuhei Kurokawa , Toshiro Doi , Julong Yuan , Li Fan
DOI: 10.1149/2.0421712JSS
关键词:
摘要:
elsevier.com
sci-hub.se 参考文章(36)
N. Haustrup, G.M. O’Connor, Impact of laser wavelength on the emission of electrons and ions from thin gold films during femtosecond laser ablation Applied Surface Science. ,vol. 302, pp. 1- 5 ,(2014) , 10.1016/J.APSUSC.2014.01.150
Logan DesAutels, Christopher Brewer, Peter Powers, Mark Walker, David Tomlin, Albert Fratini, Shane Juhl, Weibin Chen, Femtosecond index change mechanisms and morphology of SiC crystalline materials Physics Letters A. ,vol. 373, pp. 583- 591 ,(2009) , 10.1016/J.PHYSLETA.2008.11.062
Yuanyuan Dong, Pal Molian, Coulomb explosion-induced formation of highly oriented nanoparticles on thin films of 3C–SiC by the femtosecond pulsed laser Applied Physics Letters. ,vol. 84, pp. 10- 12 ,(2004) , 10.1063/1.1637948
E. Leveugle, D.S. Ivanov, L.V. Zhigilei, Photomechanical spallation of molecular and metal targets: molecular dynamics study Applied Physics A. ,vol. 79, pp. 1643- 1655 ,(2004) , 10.1007/S00339-004-2682-2
Nadezhda M. Bulgakova, Igor M. Bourakov, Natalia A. Bulgakova, Rarefaction shock wave: formation under short pulse laser ablation of solids. Physical Review E. ,vol. 63, pp. 046311- 046311 ,(2001) , 10.1103/PHYSREVE.63.046311
Yusaku Izawa, Shigeki Tokita, Masayuki Fujita, Takayoshi Norimatsu, Yasukazu Izawa, Ultra fast melting process in femtosecond laser crystallization of thin a-Si layer Applied Surface Science. ,vol. 255, pp. 9764- 9769 ,(2009) , 10.1016/J.APSUSC.2009.04.067
Hengchang Guo, Hongbing Jiang, Ying Fang, Chao Peng, Hong Yang, Yan Li, Qihuang Gong, The pulse duration dependence of femtosecond laser induced refractive index modulation in fused silica Journal of Optics. ,vol. 6, pp. 787- 790 ,(2004) , 10.1088/1464-4258/6/8/008
Saulius Juodkazis, Hiroaki Misawa, Tomohiro Hashimoto, Eugene G. Gamaly, Barry Luther-Davies, Laser-induced microexplosion confined in a bulk of silica: formation of nanovoids Applied Physics Letters. ,vol. 88, pp. 201909- ,(2006) , 10.1063/1.2204847
Q. Z. Zhao, F. Ciobanu, S. Malzer, L. J. Wang, Enhancement of optical absorption and photocurrent of 6H-SiC by laser surface nanostructuring Applied Physics Letters. ,vol. 91, pp. 121107- ,(2007) , 10.1063/1.2786863
A. Borowiec, D. M. Bruce, Daniel T. Cassidy, H. K. Haugen, Imaging the strain fields resulting from laser micromachining of semiconductors Applied Physics Letters. ,vol. 83, pp. 225- 227 ,(2003) , 10.1063/1.1591241