Semiconductor processing tool front end interface with sealing capability
作者： James Kusbel , Ravinder Aggarwal
DOI:
关键词:
摘要: A sealing member provides a seal between front opening unified pod (FOUP) and semiconductor processing tool. The inhibits fluid flow an ambient environment minienvironment in end of the tool while FOUP are open to one another for transporting wafers FOUP.
lens.org 参考文章(19)
Joshua W. Shenk, William J. Fosnight, Pod to port door retention and evacuation system ,(1998)
Paul S. Filipski, Paul Bacchi, Pod load interface equipment adapted for implementation in a fims system ,(2001)
Frederick T. Rosenquist, Mark R. Davis, Sudhir Jain, Anthony C. Bonora, Sealable, transportable container having a breather assembly ,(1995)
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Gert-Jan Heerens, Erik Leonardus Ham, Robert Gabriel Maria Lansbergen, Transfer method for a mask or substrate, storage box, apparatus adapted for use in such method, and device manufacturing method including such a transfer method ,(2003)
Daniel P. Bexten, Gordon Ray Nelson, Jeffry A. Davis, Automated processing system ,(2001)
Bruce C. Rhine, Raymond S. Martin, Anthony C. Bonora, William J. Fosnight, Smif port interface adaptor ,(1995)
David Cheng, Method and apparatus for loading and unloading wafers from a wafer carrier ,(1997)
Mihir Parikh, George Allan Maney, W. George Faraco, Box door actuated retainer ,(1985)
Douglas B. McKenna, Semiconductor wafer transport container ,(1993)