Catadioptric projection objective with mirror group

摘要: A catadioptric projection objective for imaging an off-axis object field arranged in surface of the onto image has a front lens group, mirror group comprising four mirrors and having side entry, exit, plane aligned transversely to optical axis geometrically between entry exit; rear group. The are such that at least one intermediate is positioned inside radiation coming from passes times through reflected twice on concave prior exiting exit. region where chief ray height. second reflecting area impinging height deviating first direction; fourth direction opposite direction.