Hinged MEMS diaphragm
作者： Weili Cui , Ronald N. Miles
DOI:
关键词:
摘要: A micromechanical structure, comprising a substrate having through hole; residual portion of sacrificial oxide layer peripheral to the and polysilicon overlying hole, patterned have planar portion; supporting connecting on stiffeners formed extending beneath ribs surrounding portion, attached near periphery portion. The extend depth beyond stiffeners, laterally an edge are released from during manufacturing after region, reduce stress
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