Anodized titanium oxide thickness estimation with ellipsometry, reflectance spectra extrema positions and electronic imaging: importance of the interfaces electromagnetic phase-shift

摘要: Abstract The oxide thickness of anodized titanium samples has been determined through ellipsometry, reflectance spectra extrema positions and electronic imaging. position technique is applicable in the case were layer thin enough to generate an interference phenomenon inside layer. When reflected at air/oxide oxide/metal interfaces, electromagnetic field undergoes a phase-shift, which often neglected literature. By comparing obtained different techniques, it shown that this phase-shift not negligible for layers. relative error on example about 50% 17 nm thick studying discrepancy observed literature refractive indexes, 13% wavelength range (350–600 nm), induced when neglecting higher than by uncertainty indexes thicknesses below 50 nm.