Detection of electromagnetic waves using charged cantilevers

摘要: We describe micromechanical structures that are capable of sensing both electrostatic fields and electromagnetic over a wide frequency range. Typically, waves is achieved with electrically conducting antennas, which despite the many advantages do not exhibit high sensitivity broad An important aspect our present work that, in contrast to traditional dimensions oscillators sensitive can be much smaller than wavelength. characterized measured responses electric estimated performance limits by evaluating signal-to-noise ratio theoretically experimentally.