Dielectric and Optical Coatings
作者： J. M. Martínez-Duart , R. Pérez-Casero , R. M. Bueno , G. García-Ayuso , O. Sánchez-Garrido
DOI: 10.1007/978-94-011-0077-9_14
关键词:
摘要: The field of dielectric and optical coatings has undergone an upsurge in the last decade as new deposition techniques have been developed or older ones thoroughly improved. In many cases these improved were made available to satisfy specific needs areas micro-and opto-electronics. For applications films should be very reliable, a density approaching bulk value, free contaminants defects, show good adherence present uniform thickness over large areas.
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