Angular dependence of the sputtering yield from a cylindrical track

摘要: The dependence of the sputtering yield on incident angle, Θ, is determined using molecular dynamics (MD) simulations for a cylindrical track produced by fast ion. For `small' spike radius and mean energy in track, Eexc, smaller than binding energy, U, (cosΘ)−1.7 found, close to linear collision cascade (LCC) result some thermal models. On other hand, when Eexc>U, angle (cosΘ)−1. larger we obtain ∼(cosΘ)−1.6 both high low densities. Analytic models based diffusive transport are shown not give satisfactory results. In addition, at densities see correlated atom ejection ignored analytic Applying MD results experimental data electronic solid O2 large excitation suggests that effective initial Bohr adiabatic indicating rapidly transported from initially narrow track.