Interdiffused quantum-well infrared photodetectors for color sensitive arrays
作者： M. B. Johnston , M. Gal , Na Li , Zhanghai Chen , Xingquan Liu
DOI: 10.1063/1.124555
关键词:
摘要: Proton implantation and rapid thermal annealing were used to tune the infrared spectral response of quantum-well photodetectors (QWIP) by up 1.4 μm. Multiple proton implants at energies between 200 420 keV create homogeneous intermixing throughout device’s multiple-quantum-well structure. Photoluminescence measurements study effect on QWIPs for a series doses 3.5×1015 protons cm−2. By using mask during implantation, method constructing color sensitive array is proposed.
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