Atmospheric pressure plasma system
作者： Fergal O'Reilly , Anthony Herbert , Jules Braddell , Peter Dobbyn
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摘要: An atmospheric pressure plasma system (1) sharing electrodes (4) defining a region (5) mounted in an enclosure housing (2). The has open to atmosphere entry port assembly (10) and exit (11) for the continuous transfer of work-pieces through (5). embodiment illustrated is precursor process gases having relative density less than that ambient air so processor rise (2) expelling heavier exhaust gases. Where have greater assemblies (10 11) are sited above
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