A Low-Cost, Micropattern Transfer Process for Thick-Film Metallization of PDMS
作者： D. Hilbich , B. L. Gray , L. Shannon
DOI: 10.1149/2.0111705JES
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摘要: We present the detailed characterization of a novel microfabrication process to produce thick-film copper microstructures that are embedded in polydimethylsiloxane (PDMS). This …
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