preparation, properties and optical applications of thin films of titanium dioxide

摘要: Abstract The paper presents data on the optical properties, structure and oxidation of evaporated titanium films discusses structure, applications dioxide coatings prepared by heat vacuum deposited decomposition tetrachloride with atmospheric water vapour. It is shown that rate deposition pressure in evaporation unit influence greatly properties titanium. Pure can only be fast at good vacuum. Slow poor results TiOTiN cubic structure. pure air 400° to 450°C rutile high n-values while ‘poorly films’ oxidise same temperature anatase much lower n-values. Rutile especially suitable as a top film multilayer combinations. Titanium produced fuming onto hot glass are amorphous if kept below 280°C consist higher temperatures. An anodic method for applying reflectance-increasing pairs aluminium oxide mirrors described.