摘要: Simulation of the Sputtering Process.- Electron Emission from Surfaces Induced by Slow Ions and Atoms.- Modeling Magnetron Discharge.- Modelling Reactive Processes.- Depositing Aluminium Oxide: A Case Study Sputtering.- Transport Sputtered Particles Through Gas Phase.- Energy Deposition at Substrate in a System.- Process Diagnostics.- Optical Plasma Diagnostics During Indium Tin Oxide Thin Films: The Cross-Corner Cross-Magnetron Effect.- Reactively Sputter-Deposited Solid Electrolytes Their Applications.- SputteredWide-Bandgap p-Type Semiconducting Spinel AB2O4 Delafossite ABO2 Films for "Transparent Electronics".- Oxide-Based Electrochromic Materials Devices Prepared Atomic Assembly Magnetoresistive Multilayers.
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