作者: Praveenkumar Pasupathy , Aaron Chockla , Vincent C. Holmberg , Timothy D. Bogart , Sheng Zhang
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摘要: A sensor for detecting one or more materials includes a substrate, passivation layer formed on the self-resonant structure and high surface area material disposed layer. The planar spiral inductor plurality of interdigitated capacitor electrodes within an electrically conductive trace substrate in pattern having at least two turns inter-winding space between parallel segments trace. are connected to outermost turn inductor. conformal polymer coating increase sensitivity materials.