Electrothermal microactuator for large vertical displacement without tilt or lateral shift

摘要: A microactuator for displacing a platform vertically with respect to substrate includes first rigid frame, flexible bimorph beam connecting the frame substrate, second and third frame. Activation of first, second, beams allows vertical displacement negligible lateral shift. assembly plurality frames, beams, platform, beams. further embodiment four identical such microactuators oriented at sides can achieve 1D or 2D angular scanning mirror plate by activation 1 2 adjacent microactuators.