Manufacturing method of an apparatus for the processing of single molecules
作者： Falco Cornelius Marinus Jacobus Maria Van Delft , Pieter Jan Van Der Zaag , Roelof Koole , Emiel Peeters
DOI:
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摘要: The invention relates to a method for manufacturing an apparatus the processing of single molecules. According this method, self-assembling resist (155) is deposited on layer (110, PL) and allowed self-assemble into pattern two phases (155a, 155b). One these (155a) then selectively removed, at least one aperture generated in through mask remaining (155b). Thus apertures small size can readily be produced that allow molecules (M), example DNA sequencing.
lens.org 参考文章(15)
Ratnam Sooriyakumaran, Joy Cheng, Hayato Namai, Charles Thomas Rettner, Daniel Paul Sanders, Methods of forming topographical features using segregating polymer mixtures ,(2010)
Sang Soon Oh, Choon Gi Choi, Meta material and method of manufacturing the same ,(2011)
Dong Ki Yoon, Kyoung-seon Kim, Seok-Hwan Oh, Shi-Yong Yi, Seung-hak Park, Sang Ouk Kim, Method of forming fine pattern using block copolymer ,(2009)
Huiman Kang, Konstantinos C Daoulas, Juan J De Pablo, Marcus Muller, Paul Franklin Nealey, None, Methods and compositions for forming patterns with isolated or discrete features using block copolymer materials ,(2012)
Steven Holmes, William Hinsberg, Stefan Harrer, Joy Cheng, Ho-Cheol Kim, Matthew Colburn, Daniel Paul Sanders, Methods of directed self-assembly and layered structures formed therefrom ,(2009)
Jene A. Golovchenko, Gavin M. King, Daniel Branton, Gregor M. Schurmann, Controlled fabrication of gaps in electrically conducting structures ,(2004)
Charles M. Lieber, Ping Xie, Ying Fang, Qihua Xiong, High-resolution molecular sensor ,(2008)
Daniel Malko, Christian Neiss, Francesc Viñes, Andreas Görling, Competition for graphene: graphynes with direction-dependent Dirac cones. Physical Review Letters. ,vol. 108, pp. 086804- ,(2012) , 10.1103/PHYSREVLETT.108.086804
Kostya S Novoselov, Andre K Geim, Sergei V Morozov, De-eng Jiang, Yanshui Zhang, Sergey V Dubonos, Irina V Grigorieva, Alexandr A Firsov, Electric Field Effect in Atomically Thin Carbon Films Science. ,vol. 306, pp. 666- 669 ,(2004) , 10.1126/SCIENCE.1102896
Henk W. Ch. Postma, Rapid Sequencing of Individual DNA Molecules in Graphene Nanogaps Nano Letters. ,vol. 10, pp. 420- 425 ,(2010) , 10.1021/NL9029237