A thick-film capacitive pressure sensor with improved linearity due to electrode-shaping and frequency conversion
作者： D Crescini , V Ferrari , D Marioli , A Taroni
DOI: 10.1088/0957-0233/8/1/010
关键词:
摘要: Various methodologies are applied to the measurement of pressure. Among them, capacitive pressure sensor is one most useful devices due its high performance-to-price ratio, reliability and low power consumption. However, early versions transducers had a general reputation being highly nonlinear. This paper discusses design approach overcome this problem by choosing new electrode shaping coupling with an electronic circuit based on relaxation oscillator. Moreover, output signal in form frequency makes distance transmission interfacing digital systems easier. The theory operation presented description sensor's implementation thick-film technology ceramic substrates experimental results characterization.
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