Synthesis of thick and high quality cubic boron nitride films by r.f. bias assisted d.c. jet plasma chemical vapor deposition
作者： J Yu , S Matsumoto
DOI: 10.1016/J.DIAMOND.2004.02.010
关键词:
摘要: Abstract High quality cubic boron nitride films were deposited at temperature as low 870 °C by r.f. bias assisted plasma jet chemical vapor deposition. The decrease of growth is achieved the application instead d.c. bias. Raman peaks observed for samples 1120 to °C. rate approximately 0.3 μm/min and change not much with changing temperature. At nearly phase pure was obtained.
harvard.edu
sci-hub.se 参考文章(23)
T. A. Friedmann, P. B. Mirkarimi, D. L. Medlin, K. F. McCarty, E. J. Klaus, D. R. Boehme, H. A. Johnsen, M. J. Mills, D. K. Ottesen, J. C. Barbour, Ion-assisted pulsed laser deposition of cubic boron nitride films Journal of Applied Physics. ,vol. 76, pp. 3088- 3101 ,(1994) , 10.1063/1.357491
W.J Zhang, S Matsumoto, The roles of hydrogen and fluorine in the deposition of cubic boron nitride films in the Ar–N2–BF3–H2 system Chemical Physics Letters. ,vol. 330, pp. 243- 248 ,(2000) , 10.1016/S0009-2614(00)01101-5
Dmitri Litvinov, Roy Clarke, Reduced bias growth of pure-phase cubic boron nitride Applied Physics Letters. ,vol. 71, pp. 1969- 1971 ,(1997) , 10.1063/1.119429
Osamu Tsuda, Yukiko Yamada, Tsuyoshi Fujii, Toyonobu Yoshida, Preparation of cubic boron nitride films by radio frequency bias sputtering Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 13, pp. 2843- 2847 ,(1995) , 10.1116/1.579715
S. Mineta, M. Kohata, N. Yasunaga, Y. Kikuta, Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply Thin Solid Films. ,vol. 189, pp. 125- 138 ,(1990) , 10.1016/0040-6090(90)90033-A
W. Dworschak, K. Jung, H. Ehrhardt, Growth of cubic boron nitride coatings in a magnetic field enhanced r.f. glow discharge Diamond and Related Materials. ,vol. 3, pp. 337- 340 ,(1994) , 10.1016/0925-9635(94)90182-1
Daniel J. Kester, Russell Messier, Phase control of cubic boron nitride thin films Journal of Applied Physics. ,vol. 72, pp. 504- 513 ,(1992) , 10.1063/1.351881
P.B. Mirkarimi, K.F. McCarty, D.L. Medlin, Review of advances in cubic boron nitride film synthesis Materials Science & Engineering R-reports. ,vol. 21, pp. 47- 100 ,(1997) , 10.1016/S0927-796X(97)00009-0
T. Kuzuba, K. Era, T. Ishii, T. Sato, A low frequency Raman-active vibration of hexagonal boron nitride Solid State Communications. ,vol. 25, pp. 863- 865 ,(1978) , 10.1016/0038-1098(78)90288-0
Takanori Ichiki, Toshihiro Momose, Toyonobu Yoshida, Effects of the substrate bias on the formation of cubic boron nitride by inductively coupled plasma enhanced chemical vapor deposition Journal of Applied Physics. ,vol. 75, pp. 1330- 1334 ,(1994) , 10.1063/1.356411