Improved fatigue property of hafnium substitute lead zirconate titanate deposited by pulse laser deposition
作者： Zhipeng Wu , Jun Zhu , Xingpeng Liu
DOI: 10.1007/S10854-016-5731-7
关键词:
摘要: Lead hafnate titanate (PHT) thin film was deposited by pulse laser deposition, characterized for the usage as a ferroelectric capacitor in view of Ferroelectric Random Access Memory (FeRAM) devices, and compared with lead zirconate (PZT) reference, which fabricated same conditions. Results indicate that 126 nm-thickness PHT low temperature self-buffer layer has single (111)-orientation. The following electric measurements were performed to investigate possibility this use FeRAM applications contrast PZT reference. This sample demonstrates good property remanent polarization 51 μC/cm2. no obvious degradation been observed after 2 × 109 fatigue reversals, promising candidate applications.
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C. G. Wu, Y. R. Li, J. Zhu, X. Z. Liu, W. L. Zhang, Great enhancement of pyroelectric properties for Ba0.65Sr0.35TiO3 films on Pt–Si substrates by inserting a self-buffered layer Journal of Applied Physics. ,vol. 105, pp. 044107- ,(2009) , 10.1063/1.3081971
Matthijn Dekkers, Minh D. Nguyen, Ruud Steenwelle, Paul M. te Riele, Dave H. A. Blank, Guus Rijnders, Ferroelectric properties of epitaxial Pb(Zr,Ti)O3 thin films on silicon by control of crystal orientation Applied Physics Letters. ,vol. 95, pp. 012902- ,(2009) , 10.1063/1.3163057
J. Lindner, M. Schumacher, M. Dauelsberg, F. Schienle, S. Miedl, D. Burgess, E. Merz, G. Strauch, H. Juergensen, Deposition of electroceramic thin films by MOCVD Advanced Materials for Optics and Electronics. ,vol. 10, pp. 163- 167 ,(2000) , 10.1002/1099-0712(200005/10)10:3/5<163::AID-AMO405>3.0.CO;2-A
Toyota Morimoto, Osamu Hidaka, Kouji Yamakawa, Osamu Arisumi, Hiroyuki Kanaya, Tsuyoshi Iwamoto, Yoshinori Kumura, Iwao Kunishima, Shin-ichi Tanaka, Ferroelectric Properties of Pb(Zi, Ti)O3Capacitor with Thin SrRuO3Films within Both Electrodes Japanese Journal of Applied Physics. ,vol. 39, pp. 2110- 2113 ,(2000) , 10.1143/JJAP.39.2110
Yong-Jin Seo, Woo-Sun Lee, Chemical mechanical polishing of Ba0.6Sr0.4TiO3 film prepared by sol–gel method Microelectronic Engineering. ,vol. 75, pp. 149- 154 ,(2004) , 10.1016/J.MEE.2004.03.086
J. Frantti, Y. Fujioka, S. Eriksson, S. Hull, M. Kakihana, Neutron Powder Diffraction Study of Pb(HfxTi1-x)O3 Ceramics (0.10 ≤ x ≤ 0.50) Inorganic Chemistry. ,vol. 44, pp. 9267- 9278 ,(2005) , 10.1021/IC051169M
Wei Li, Jun Gu, Chunhua Song, Dong Su, Jinsong Zhu, B-site doping effect on ferroelectric property of bismuth titanate ceramic Journal of Applied Physics. ,vol. 98, pp. 114104- ,(2005) , 10.1063/1.2134877
V.V. Sidsky, A.V. Semchenko, A.G. Rybakov, V.V. Kolos, A.S. Turtsevich, A.N. Asadchyi, W. Strek, La3+-doped SrBi2Ta2O9 thin films for FRAM synthesized by sol-gel method Journal of Rare Earths. ,vol. 32, pp. 277- 281 ,(2014) , 10.1016/S1002-0721(14)60065-X
H. Kohlstedt, Y. Mustafa, A. Gerber, A. Petraru, M. Fitsilis, R. Meyer, U. Böttger, R Waser, Current status and challenges of ferroelectric memory devices Microelectronic Engineering. ,vol. 80, pp. 296- 304 ,(2005) , 10.1016/J.MEE.2005.04.084
Peter Jorg Schorn, Theodor Schneller, Ulrich Bottger, Rainer Waser, Characterization of Chemical Solution Deposition-Derived Lead Hafnate Titanate Thin Films Journal of the American Ceramic Society. ,vol. 88, pp. 1312- 1314 ,(2005) , 10.1111/J.1551-2916.2004.00177.X