作者: Sit Kerdsongpanya , Ngo Van Nong , Nini Pryds , Agnė Žukauskaitė , Jens Jensen
DOI: 10.1063/1.3665945
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摘要: Thermoelectric properties of ScN thin films grown by reactive magnetron sputtering on Al2O3(0001) wafers are reported. X-ray diffraction and elastic recoil detection analyses show that the composition is close to stoichiometry with trace amounts (∼1 at. % in total) C, O, F. We found thin-film exhibits a rather low electrical resistivity ∼2.94 μΩm, while its Seebeck coefficient approximately ∼−86 μV/K at 800 K, yielding power factor ∼2.5 × 10−3 W/mK2. This value anomalously high for common transition-metal nitrides.