Method for manufacturing a magneto-resistance effect element and magnetic recording and reproducing apparatus
作者： Shuichi Murakami , Erhard Schreck , Min Li , Yoshihiko Fuji , Kunliang Zhang
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摘要: A method for manufacturing a magneto-resistance effect element is provided. The includes first magnetic layer including ferromagnetic material, second material and spacer provided between the layer, having an insulating conductive portion penetrating through layer. includes: forming film to be base of layer; performing treatment using gas at least one oxygen molecules, atoms, ions, plasma radicals on film; hydrogen plasma, radicals, deuterium submitted treatment.
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