Optical constants of sputter-deposited Ti-Ce oxide and Zr-Ce oxide films
作者： Monica Veszelei , Lisen Kullman , Claes G. Granqvist , Nik von Rottkay , Mike Rubin
DOI: 10.1364/AO.37.005993
关键词:
摘要: Films of Ti oxide, Zr Ce Ti-Ce and Zr-Ce oxide were made by means reactive dc magnetron sputtering in a multitarget arrangement. The films characterized x-ray diffraction electrochemical measurements, both techniques being firmly connected to stoichiometric information. optical constants n k evalued from spectrophotometry variable-angle spectroscopic ellipsometry. two analyses gave consistent results. It was found that for the mixed-oxide varied smoothly between values pure oxides, whereas band-gap range showed characteristic differences oxide. is speculated this difference associated with structural effects.
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