High dynamic range optical inspection system and method
作者： David Willenborg , Rajeshwar Chhibber
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摘要: A high dynamic range and precision broadband optical inspection system (1) method are provided. The provides capability of patterned unpatterned substrates (27) in which a very large with is desirable to provide detection light scattering defects from sub micron hundreds microns size. permits throughput substrate the sides, bevels edges may be rapidly or simultaneously inspected for defects.
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