Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition
作者： Manish Chhowalla , KBK Teo , C Ducati , NL Rupesinghe , GAJ Amaratunga
DOI: 10.1063/1.1410322
关键词:
摘要: The growth of vertically aligned carbon nanotubes using a direct current plasma enhanced chemical vapor deposition system is reported. The growth properties are studied as a …
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Michael A Lieberman, Alan J Lichtenberg, Principles of Plasma Discharges and Materials Processing ,(1994)
C. Journet, W. K. Maser, P. Bernier, A. Loiseau, M. Lamy de la Chapelle, S. Lefrant, P. Deniard, R. Lee, J. E. Fischer, Large-scale production of single-walled carbon nanotubes by the electric-arc technique Nature. ,vol. 388, pp. 756- 758 ,(1997) , 10.1038/41972
R BAKER, Formation of filamentous carbon from iron, cobalt and chromium catalyzed decomposition of acetylene Journal of Catalysis. ,vol. 30, pp. 86- 95 ,(1973) , 10.1016/0021-9517(73)90055-9
H. Cui, O. Zhou, B. R. Stoner, Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition Journal of Applied Physics. ,vol. 88, pp. 6072- 6074 ,(2000) , 10.1063/1.1320024
R. Saito, T. Takeya, T. Kimura, G. Dresselhaus, M. S. Dresselhaus, Raman intensity of single-wall carbon nanotubes Physical Review B. ,vol. 57, pp. 4145- 4153 ,(1998) , 10.1103/PHYSREVB.57.4145
Gary G. Tibbetts, Why are carbon filaments tubular? Journal of Crystal Growth. ,vol. 66, pp. 632- 638 ,(1984) , 10.1016/0022-0248(84)90163-5
Alan M. Cassell, Jeffrey A. Raymakers, Jing Kong, Hongjie Dai, Large Scale CVD Synthesis of Single-Walled Carbon Nanotubes Journal of Physical Chemistry B. ,vol. 103, pp. 6484- 6492 ,(1999) , 10.1021/JP990957S
E. Frackowiak, K. Metenier, V. Bertagna, F. Beguin, Supercapacitor electrodes from multiwalled carbon nanotubes Applied Physics Letters. ,vol. 77, pp. 2421- 2423 ,(2000) , 10.1063/1.1290146
Shoushan Fan, Michael G Chapline, Nathan R Franklin, Thomas W Tombler, Alan M Cassell, Hongjie Dai, Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties Science. ,vol. 283, pp. 512- 514 ,(1999) , 10.1126/SCIENCE.283.5401.512
ZF Ren, ZiP Huang, JW Xu, JH Wang, P Bush, MP Siegal, PN Provencio, Synthesis of Large Arrays of Well-Aligned Carbon Nanotubes on Glass Science. ,vol. 282, pp. 1105- 1107 ,(1998) , 10.1126/SCIENCE.282.5391.1105