Method for decomposition of a customized DOE for use with a single exposure into a set of multiple exposures using standard DOEs with optimized exposure settings
作者： Ting Chen , Jang Fung Chen
DOI:
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摘要: A method of determining diffractive optical elements to be utilized in an imaging process. The includes the steps defining a customized element which is based on target pattern printed during process; decomposing into one or more standard elements; and exposure dose assigned each elements.
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