Tandem array of nanoelectronic readers embedded coplanar to a fluidic nanochannel for correlated single biopolymer analysis

摘要: We have developed a two-step electron-beam lithography process to fabricate tandem array of three pairs tip-like gold nanoelectronic detectors with electrode gap size as small 9 nm, embedded in coplanar fashion 60 nm deep, 100 nm wide, and up 150 μm long nanochannels coupled world-micro-nanofluidic interface for easy sample introduction. Experimental tests sealed device using DNA-protein complexes demonstrate the coplanarity nanoelectrodes nanochannel surface. Further, this could improve transverse current detection by correlated time-of-flight measurements translocating samples, serve an autocalibrated velocimeter nanoscale Coulter counters single molecule analysis heterogeneous samples.