Mechanism of Selective Growth of Carbon Nanotubes on SiO2/Si Patterns

摘要: During the chemical vapor deposition of multiwalled carbon nanotubes using phase delivery a metal-organic (ferrocene) catalyst precursor, strong selectivity for growth on patterned SiO2/Si substrates has been observed. A mechanism this selective is described here. Delivered metal particles (Fe) Si and SiO2 regions were investigated several high-resolution characterization techniques. Active iron (γ iron) formed silicon oxide surface resulting in formation highly aligned substrate. However, regions, stable FeSi2 Fe2SiO4 due to reactions between Fe at high temperature leading an inhibition nanotube regions.