Monitoring and control of sterilization processes with semiconductor sensor modules

摘要: A semiconductor sensing element (124) is mounted in a sterilization chamber (1). The composition of the sensor selected such that one its electrical characteristics, for example, capacitance or resistance, changes with concentration chemical sterilant within real-time. receiving unit (126) monitors solid-state and stores baseline characteristic value corresponding to at first set values environmental parameters, temperature, pressure, relative humidity, air-flow velocity, an oxidizing substance concentration, combinations these. compares real-time provide indication concentration. sterilizer control (12) controls other system parameters accordance from unit. When more change, causes change new parameters.